Room temperature CO gas sensing using Zn-doped In2O3 single nanowire field effect transistors

• Main Authors: Singh, Nandan, Yan, Chaoyi, Lee, Pooi See
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/97106; http://hdl.handle.net/10220/10470
• Institution: Nanyang Technological University

We demonstrate a room temperature sensing of CO gas (1–5 ppm) using high performance single Zn-doped In2O3 nanowire field effect transistors (Zn–In2O3 NW-FETs). Zn–In2O3 nanowires were grown in a horizontal CVD furnace; single Zn–In2O3 NW-FETs were fabricated using SiNx dielectric layer and bottom g...