High-performance and tailorable pressure sensor based on ultrathin conductive polymer film

A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limi...

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Bibliographic Details
Main Authors: Shao, Qi, Niu, Zhiqiang, Hirtz, Michael, Jiang, Lin, Liu, Yuanjun, Wang, Zhaohui, Chen, Xiaodong
Other Authors: School of Materials Science & Engineering
Format: Article
Language:English
Published: 2014
Subjects:
Online Access:https://hdl.handle.net/10356/97528
http://hdl.handle.net/10220/19631
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Institution: Nanyang Technological University
Language: English
Description
Summary:A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.