High-performance and tailorable pressure sensor based on ultrathin conductive polymer film
A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limi...
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Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/97528 http://hdl.handle.net/10220/19631 |
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Institution: | Nanyang Technological University |
Language: | English |
Summary: | A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated. |
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