High-performance and tailorable pressure sensor based on ultrathin conductive polymer film

A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limi...

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書目詳細資料
Main Authors: Shao, Qi, Niu, Zhiqiang, Hirtz, Michael, Jiang, Lin, Liu, Yuanjun, Wang, Zhaohui, Chen, Xiaodong
其他作者: School of Materials Science & Engineering
格式: Article
語言:English
出版: 2014
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在線閱讀:https://hdl.handle.net/10356/97528
http://hdl.handle.net/10220/19631
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機構: Nanyang Technological University
語言: English
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總結:A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.