Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS

• Main Authors: Tian, Yang, Lee, Kokyan, Wang, Hong
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
• Online Access: https://hdl.handle.net/10356/97539; http://hdl.handle.net/10220/19655
• Institution: Nanyang Technological University

We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective permittivity (∼1.02) in the frequency range of 0.1–40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications.