An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives
This paper presents an electro-thermal micro-actuator based on polymer composite for dual-stage head positioning systems in hard disk drives (HDDs). This micro-actuator has a pair of benders, which are made of silicon–polymer composite. When electro-thermally activated by resistive heating, the comp...
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sg-ntu-dr.10356-975902020-03-07T13:22:18Z An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives Yang, J. P. Tan, C. P. He, Z. M. Lau, Gih Keong Chong, Nyok-Boon Thubthimthong, Borriboon School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering This paper presents an electro-thermal micro-actuator based on polymer composite for dual-stage head positioning systems in hard disk drives (HDDs). This micro-actuator has a pair of benders, which are made of silicon–polymer composite. When electro-thermally activated by resistive heating, the composite expands and consequently the benders produce a lateral bending motion to drive a femto slider, which carries a magnetic read/write head. The micro-actuator has been fabricated by deep silicon etching and polymer patterning. Experiment shows that the micro-actuator can drive up to 35 nm peak-to-peak displacement when it is activated by a 3.25 V half-sine input voltage at 500 Hz under a moderate temperature rise. The first in-plane mechanical resonant frequency is measured to occur at 36.8 kHz. Analytical and finite element models were developed to simulate the micro-actuator performance. It is noted that the simulation results agree well with the experimental measurement. With good performance, the electro-thermal micro-actuator are useful for high bandwidth dual-stage positioning systems in future high-density HDDs. 2013-07-24T08:44:31Z 2019-12-06T19:44:22Z 2013-07-24T08:44:31Z 2019-12-06T19:44:22Z 2012 2012 Journal Article Yang, J. P., Lau, G. K., Tan, C. P., Chong, N.-B., Thubthimthong, B., & He, Z. M. (2012). An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives. Sensors and Actuators A: Physical, 187, 98-104. 0924-4247 https://hdl.handle.net/10356/97590 http://hdl.handle.net/10220/12127 10.1016/j.sna.2012.08.009 en Sensors and actuators A : physical © 2012 Elsevier B.V. |
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DRNTU::Engineering::Mechanical engineering Yang, J. P. Tan, C. P. He, Z. M. Lau, Gih Keong Chong, Nyok-Boon Thubthimthong, Borriboon An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives |
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This paper presents an electro-thermal micro-actuator based on polymer composite for dual-stage head positioning systems in hard disk drives (HDDs). This micro-actuator has a pair of benders, which are made of silicon–polymer composite. When electro-thermally activated by resistive heating, the composite expands and consequently the benders produce a lateral bending motion to drive a femto slider, which carries a magnetic read/write head. The micro-actuator has been fabricated by deep silicon etching and polymer patterning. Experiment shows that the micro-actuator can drive up to 35 nm peak-to-peak displacement when it is activated by a 3.25 V half-sine input voltage at 500 Hz under a moderate temperature rise. The first in-plane mechanical resonant frequency is measured to occur at 36.8 kHz. Analytical and finite element models were developed to simulate the micro-actuator performance. It is noted that the simulation results agree well with the experimental measurement. With good performance, the electro-thermal micro-actuator are useful for high bandwidth dual-stage positioning systems in future high-density HDDs. |
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School of Mechanical and Aerospace Engineering |
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School of Mechanical and Aerospace Engineering Yang, J. P. Tan, C. P. He, Z. M. Lau, Gih Keong Chong, Nyok-Boon Thubthimthong, Borriboon |
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Article |
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Yang, J. P. Tan, C. P. He, Z. M. Lau, Gih Keong Chong, Nyok-Boon Thubthimthong, Borriboon |
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Yang, J. P. |
title |
An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives |
title_short |
An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives |
title_full |
An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives |
title_fullStr |
An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives |
title_full_unstemmed |
An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives |
title_sort |
electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives |
publishDate |
2013 |
url |
https://hdl.handle.net/10356/97590 http://hdl.handle.net/10220/12127 |
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1681039450772078592 |