Multifunctional cantilever-free scanning probe arrays coated with multilayer graphene
Scanning probe instruments have expanded beyond their traditional role as imaging or “reading” tools and are now routinely used for “writing.” Although a variety of scanning probe lithography techniques are available, each one imposes different requirements on the types of probes that must be used....
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
|
| Online Access: | https://hdl.handle.net/10356/98253 http://hdl.handle.net/10220/12342 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | Scanning probe instruments have expanded beyond their traditional role as imaging or “reading” tools and are now routinely used for “writing.” Although a variety of scanning probe lithography techniques are available, each one imposes different requirements on the types of probes that must be used. Additionally, throughput is a major concern for serial writing techniques, so for a scanning probe lithography technique to become widely applied, there needs to be a reasonable path toward a scalable architecture. Here, we use a multilayer graphene coating method to create multifunctional massively parallel probe arrays that have wear-resistant tips of uncompromised sharpness and high electrical and thermal conductivities. The optical transparency and mechanical flexibility of graphene allow this procedure to be used for coating exceptionally large, cantilever-free arrays that can pattern with electrochemical desorption and thermal, in addition to conventional, dip-pen nanolithography. |
|---|