Silicon-based optoelectronic integrated circuit for label-free bio/chemical sensor
We demonstrate a silicon-based optoelectronic integrated circuit (OEIC) for label-free bio/chemical sensing application. Such on-chip OEIC sensor system consists of optical grating couplers for vertical light coupling into silicon waveguides, a thermal-tunable microring as a tunable filter, an expos...
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Main Authors: | , , , , , , , , , , , , , |
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格式: | Article |
語言: | English |
出版: |
2013
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在線閱讀: | https://hdl.handle.net/10356/98255 http://hdl.handle.net/10220/13306 |
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