Dual wavelength digital holography for improving the measurement accuracy

• Main Authors: Di, Jianglei, Qu, Weijuan, Wu, Bingjing, Chen, Xin, Zhao, Jianlin, Asundi, Anand Krishna
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/98368; http://hdl.handle.net/10220/13364
• Institution: Nanyang Technological University

In dual wavelength digital holography, a synthetic wavelength is obtained by using two lasers with different wavelengths to expand the measurement range of samples’ step heights from nanometers to micrometers. However, its measurement accuracy reduces along with the expansion of measuring range and...