Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing
10.1116/1.1789214
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sg-nus-scholar.10635-1071812023-10-26T08:08:49Z Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing Zhang, L.H. Gong, H. Li, Y.Q. Wang, J.P. MATERIALS SCIENCE 10.1116/1.1789214 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 22 6 2239-2245 JVTAD 2014-10-29T08:40:38Z 2014-10-29T08:40:38Z 2004-11 Article Zhang, L.H., Gong, H., Li, Y.Q., Wang, J.P. (2004-11). Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 22 (6) : 2239-2245. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1789214 07342101 http://scholarbank.nus.edu.sg/handle/10635/107181 000225505900004 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1116/1.1789214 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Zhang, L.H. Gong, H. Li, Y.Q. Wang, J.P. |
| format |
Article |
| author |
Zhang, L.H. Gong, H. Li, Y.Q. Wang, J.P. |
| spellingShingle |
Zhang, L.H. Gong, H. Li, Y.Q. Wang, J.P. Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing |
| author_sort |
Zhang, L.H. |
| title |
Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing |
| title_short |
Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing |
| title_full |
Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing |
| title_fullStr |
Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing |
| title_full_unstemmed |
Reactions of ultrathin hard amorphous carbon (a-C) films under microbeam laser processing |
| title_sort |
reactions of ultrathin hard amorphous carbon (a-c) films under microbeam laser processing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/107181 |
| _version_ |
1781788351452413952 |