The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling
10.1016/S0218-625X(01)00123-3
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2014
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sg-nus-scholar.10635-1131072024-11-15T07:05:22Z The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling Lau, G.S. Tok, E.S. Wee, A.T.S. Liu, R. Lim, S.L. INSTITUTE OF ENGINEERING SCIENCE PHYSICS MATERIALS SCIENCE 10.1016/S0218-625X(01)00123-3 Surface Review and Letters 8 5 453-457 SRLEF 2014-11-28T09:12:06Z 2014-11-28T09:12:06Z 2001 Article Lau, G.S.,Tok, E.S.,Wee, A.T.S.,Liu, R.,Lim, S.L. (2001). The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling. Surface Review and Letters 8 (5) : 453-457. ScholarBank@NUS Repository. <a href="https://doi.org/10.1016/S0218-625X(01)00123-3" target="_blank">https://doi.org/10.1016/S0218-625X(01)00123-3</a> 0218625X http://scholarbank.nus.edu.sg/handle/10635/113107 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
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NUS Library |
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Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| description |
10.1016/S0218-625X(01)00123-3 |
| author2 |
INSTITUTE OF ENGINEERING SCIENCE |
| author_facet |
INSTITUTE OF ENGINEERING SCIENCE Lau, G.S. Tok, E.S. Wee, A.T.S. Liu, R. Lim, S.L. |
| format |
Article |
| author |
Lau, G.S. Tok, E.S. Wee, A.T.S. Liu, R. Lim, S.L. |
| spellingShingle |
Lau, G.S. Tok, E.S. Wee, A.T.S. Liu, R. Lim, S.L. The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling |
| author_sort |
Lau, G.S. |
| title |
The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling |
| title_short |
The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling |
| title_full |
The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling |
| title_fullStr |
The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling |
| title_full_unstemmed |
The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profiling |
| title_sort |
investigation of surface topography development in si(001) and si(111) during sims depth profiling |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113107 |
| _version_ |
1821215991340728320 |