APA Citation

Liu, R., Wee, A., Liu, L., Hao, G., & SCIENCE, I. O. E. (2014). The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion.

Chicago Style Citation

Liu, R., A.T.S Wee, L. Liu, G. Hao, and INSTITUTE OF ENGINEERING SCIENCE. The Use of Sample Rotation in SIMS Profiling of Ta Barrier Layers to Cu Diffusion. 2014.

MLA Citation

Liu, R., et al. The Use of Sample Rotation in SIMS Profiling of Ta Barrier Layers to Cu Diffusion. 2014.

Warning: These citations may not always be 100% accurate.