Liu, R., Wee, A., Liu, L., Hao, G., & SCIENCE, I. O. E. (2014). The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion.
Chicago Style CitationLiu, R., A.T.S Wee, L. Liu, G. Hao, and INSTITUTE OF ENGINEERING SCIENCE. The Use of Sample Rotation in SIMS Profiling of Ta Barrier Layers to Cu Diffusion. 2014.
MLA CitationLiu, R., et al. The Use of Sample Rotation in SIMS Profiling of Ta Barrier Layers to Cu Diffusion. 2014.
Warning: These citations may not always be 100% accurate.