A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication

10.1007/s00170-013-4758-7

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Main Authors: Hu, H., Zhen, L., Sun, Z., Zhang, H.
Other Authors: CENTRE FOR MARITIME STUDIES
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113196
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1131962024-11-15T07:23:16Z A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication Hu, H. Zhen, L. Sun, Z. Zhang, H. CENTRE FOR MARITIME STUDIES Bottleneck Fluctuation smoothing Semiconductor wafer fabrication system 10.1007/s00170-013-4758-7 International Journal of Advanced Manufacturing Technology 67 1-4 111-120 IJATE 2014-11-30T06:40:52Z 2014-11-30T06:40:52Z 2013-07 Article Hu, H., Zhen, L., Sun, Z., Zhang, H. (2013-07). A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication. International Journal of Advanced Manufacturing Technology 67 (1-4) : 111-120. ScholarBank@NUS Repository. https://doi.org/10.1007/s00170-013-4758-7 02683768 http://scholarbank.nus.edu.sg/handle/10635/113196 000321117300010 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Bottleneck
Fluctuation smoothing
Semiconductor wafer fabrication system
spellingShingle Bottleneck
Fluctuation smoothing
Semiconductor wafer fabrication system
Hu, H.
Zhen, L.
Sun, Z.
Zhang, H.
A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
description 10.1007/s00170-013-4758-7
author2 CENTRE FOR MARITIME STUDIES
author_facet CENTRE FOR MARITIME STUDIES
Hu, H.
Zhen, L.
Sun, Z.
Zhang, H.
format Article
author Hu, H.
Zhen, L.
Sun, Z.
Zhang, H.
author_sort Hu, H.
title A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_short A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_full A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_fullStr A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_full_unstemmed A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_sort multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/113196
_version_ 1821225268973404160