A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication

10.1007/s00170-013-4758-7

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Bibliographic Details
Main Authors:	Hu, H., Zhen, L., Sun, Z., Zhang, H.
Other Authors:	CENTRE FOR MARITIME STUDIES
Format:	Article
Published:	2014
Subjects:	Bottleneck Fluctuation smoothing Semiconductor wafer fabrication system
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113196
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113196
record_format	dspace
spelling	sg-nus-scholar.10635-1131962024-11-15T07:23:16Z A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication Hu, H. Zhen, L. Sun, Z. Zhang, H. CENTRE FOR MARITIME STUDIES Bottleneck Fluctuation smoothing Semiconductor wafer fabrication system 10.1007/s00170-013-4758-7 International Journal of Advanced Manufacturing Technology 67 1-4 111-120 IJATE 2014-11-30T06:40:52Z 2014-11-30T06:40:52Z 2013-07 Article Hu, H., Zhen, L., Sun, Z., Zhang, H. (2013-07). A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication. International Journal of Advanced Manufacturing Technology 67 (1-4) : 111-120. ScholarBank@NUS Repository. https://doi.org/10.1007/s00170-013-4758-7 02683768 http://scholarbank.nus.edu.sg/handle/10635/113196 000321117300010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Bottleneck Fluctuation smoothing Semiconductor wafer fabrication system
spellingShingle	Bottleneck Fluctuation smoothing Semiconductor wafer fabrication system Hu, H. Zhen, L. Sun, Z. Zhang, H. A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
description	10.1007/s00170-013-4758-7
author2	CENTRE FOR MARITIME STUDIES
author_facet	CENTRE FOR MARITIME STUDIES Hu, H. Zhen, L. Sun, Z. Zhang, H.
format	Article
author	Hu, H. Zhen, L. Sun, Z. Zhang, H.
author_sort	Hu, H.
title	A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_short	A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_full	A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_fullStr	A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_full_unstemmed	A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
title_sort	multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113196
_version_	1821225268973404160

A multi-stage fluctuation smoothing method for multiple bottlenecks in wafer fabrication

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