Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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2014
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sg-nus-scholar.10635-1146372015-03-10T04:47:06Z Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens Cheng, M. Lu, Y. Yao, Z. SINGAPORE-MIT ALLIANCE Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 5 2038-2042 JVTBD 2014-12-02T08:39:06Z 2014-12-02T08:39:06Z 2003-09 Article Cheng, M.,Lu, Y.,Yao, Z. (2003-09). Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 (5) : 2038-2042. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/114637 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| author2 |
SINGAPORE-MIT ALLIANCE |
| author_facet |
SINGAPORE-MIT ALLIANCE Cheng, M. Lu, Y. Yao, Z. |
| format |
Article |
| author |
Cheng, M. Lu, Y. Yao, Z. |
| spellingShingle |
Cheng, M. Lu, Y. Yao, Z. Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens |
| author_sort |
Cheng, M. |
| title |
Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens |
| title_short |
Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens |
| title_full |
Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens |
| title_fullStr |
Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens |
| title_full_unstemmed |
Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens |
| title_sort |
differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/114637 |
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1681094861727465472 |