Profile simulation and fabrication of gold nanostructures by separated nanospheres with oblique deposition and perpendicular etching

Profile simulation and fabrication of gold nanostructures by separated nanospheres with oblique deposition and perpendicular etching

10.1007/s11468-007-9040-0

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Bibliographic Details
Main Authors: Zhou, X., Virasawmy, S., Knoll, W., Liu, K.Y., Tse, M.S., Yen, L.W.
Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
Format: Article
Published: 2014
Subjects:
Angle deposition
Nanosphere lithography
Nanostructure
Numerical simulation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/115246
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Institution: National University of Singapore
Description
Summary:10.1007/s11468-007-9040-0

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