Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method

Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method

10.1186/1556-276X-7-416

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Bibliographic Details
Main Authors: Dang, Z., Breese, M.B.H., Recio-Sánchez, G., Azimi, S., Song, J., Liang, H., Banas, A., Torres-Costa, V., Martín-Palma, R.J.
Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
Format: Article
Published: 2014
Subjects:
Defect density
Photonic band structure
Proton beam writing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/116592
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Institution: National University of Singapore
Description
Summary:10.1186/1556-276X-7-416

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