Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering
10.1088/0268-1242/22/11/009
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2014
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sg-nus-scholar.10635-1169462024-11-13T08:37:38Z Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering Wong, T.K.S. Gong, Y. Yang, P. Ng, C.M. SINGAPORE SYNCHROTRON LIGHT SOURCE 10.1088/0268-1242/22/11/009 Semiconductor Science and Technology 22 11 1232-1239 SSTEE 2014-12-12T07:59:32Z 2014-12-12T07:59:32Z 2007-11-01 Article Wong, T.K.S., Gong, Y., Yang, P., Ng, C.M. (2007-11-01). Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering. Semiconductor Science and Technology 22 (11) : 1232-1239. ScholarBank@NUS Repository. https://doi.org/10.1088/0268-1242/22/11/009 02681242 http://scholarbank.nus.edu.sg/handle/10635/116946 000250727700009 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1088/0268-1242/22/11/009 |
| author2 |
SINGAPORE SYNCHROTRON LIGHT SOURCE |
| author_facet |
SINGAPORE SYNCHROTRON LIGHT SOURCE Wong, T.K.S. Gong, Y. Yang, P. Ng, C.M. |
| format |
Article |
| author |
Wong, T.K.S. Gong, Y. Yang, P. Ng, C.M. |
| spellingShingle |
Wong, T.K.S. Gong, Y. Yang, P. Ng, C.M. Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering |
| author_sort |
Wong, T.K.S. |
| title |
Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering |
| title_short |
Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering |
| title_full |
Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering |
| title_fullStr |
Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering |
| title_full_unstemmed |
Characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering |
| title_sort |
characterization of biaxial stressed silicon by spectroscopic ellipsometry and synchrotron x-ray scattering |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/116946 |
| _version_ |
1821204123952873472 |