Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications

Ph.D

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Main Author:	PRABAKARAN SARAVANAN
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2015
Subjects:	SU-8 composites, Polymer tribology, Perfluoropolyether, self-lubrication, photo-resist, MEMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/119834
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-119834
record_format	dspace
spelling	sg-nus-scholar.10635-1198342015-05-31T19:53:05Z Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications PRABAKARAN SARAVANAN MECHANICAL ENGINEERING DUONG HAI MINH LIM YUI HUNG, CHRISTINA SINHA, SUJEET KUMAR SU-8 composites, Polymer tribology, Perfluoropolyether, self-lubrication, photo-resist, MEMS Ph.D DOCTOR OF PHILOSOPHY 2015-05-31T18:01:36Z 2015-05-31T18:01:36Z 2015-01-09 Thesis PRABAKARAN SARAVANAN (2015-01-09). Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/119834 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	SU-8 composites, Polymer tribology, Perfluoropolyether, self-lubrication, photo-resist, MEMS
spellingShingle	SU-8 composites, Polymer tribology, Perfluoropolyether, self-lubrication, photo-resist, MEMS PRABAKARAN SARAVANAN Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications
description	Ph.D
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING PRABAKARAN SARAVANAN
format	Theses and Dissertations
author	PRABAKARAN SARAVANAN
author_sort	PRABAKARAN SARAVANAN
title	Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications
title_short	Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications
title_full	Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications
title_fullStr	Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications
title_full_unstemmed	Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications
title_sort	tribology of self-lubricating su-8 composites for micro-electro mechanical systems (mems) applications
publishDate	2015
url	http://scholarbank.nus.edu.sg/handle/10635/119834
_version_	1681095581866393600

Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications

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