DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS

Ph.D

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Bibliographic Details
Main Author:	LIU NANNAN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2016
Subjects:	Ion source, electron and ion optics, high brightness, ion lithography, microfabrication
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/122314
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-122314
record_format	dspace
spelling	sg-nus-scholar.10635-1223142024-10-26T01:41:07Z DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS LIU NANNAN ELECTRICAL & COMPUTER ENGINEERING KHURSHEED, ANJAM VAN KAN, JEROEN ANTON Ion source, electron and ion optics, high brightness, ion lithography, microfabrication Ph.D DOCTOR OF PHILOSOPHY 2016-01-31T18:00:22Z 2016-01-31T18:00:22Z 2015-09-30 Thesis LIU NANNAN (2015-09-30). DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/122314 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Ion source, electron and ion optics, high brightness, ion lithography, microfabrication
spellingShingle	Ion source, electron and ion optics, high brightness, ion lithography, microfabrication LIU NANNAN DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LIU NANNAN
format	Theses and Dissertations
author	LIU NANNAN
author_sort	LIU NANNAN
title	DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_short	DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_full	DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_fullStr	DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_full_unstemmed	DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_sort	development of an electron impact gas ion source for proton beam writing applications
publishDate	2016
url	http://scholarbank.nus.edu.sg/handle/10635/122314
_version_	1821209468056109056

DEVELOPMENT OF AN ELECTRON IMPACT GAS ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS

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