Dual-stage nanopositioning scheme for 10 Tbit/in2 hard disk drives with a shear-mode piezoelectric single-crystal microactuator
10.1109/TMAG.2014.2359417
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Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Article |
Published: |
Institute of Electrical and Electronics Engineers Inc.
2016
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/127368 |
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Institution: | National University of Singapore |
Summary: | 10.1109/TMAG.2014.2359417 |
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