A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures

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Main Author:	MAHADEVAIAH GOPAL
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	InP MEMS, Micro-cantilevers, Fabry-Perot membranes, Young's modulus, hardness, stress and strain
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13114
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-13114
record_format	dspace
spelling	sg-nus-scholar.10635-131142017-10-21T10:03:56Z A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures MAHADEVAIAH GOPAL MECHANICAL ENGINEERING TAY CHO JUI QUAN CHENGGEN InP MEMS, Micro-cantilevers, Fabry-Perot membranes, Young's modulus, hardness, stress and strain Master's MASTER OF ENGINEERING 2010-04-08T10:30:04Z 2010-04-08T10:30:04Z 2008-01-16 Thesis MAHADEVAIAH GOPAL (2008-01-16). A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13114 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	InP MEMS, Micro-cantilevers, Fabry-Perot membranes, Young's modulus, hardness, stress and strain
spellingShingle	InP MEMS, Micro-cantilevers, Fabry-Perot membranes, Young's modulus, hardness, stress and strain MAHADEVAIAH GOPAL A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures
description	Master's
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING MAHADEVAIAH GOPAL
format	Theses and Dissertations
author	MAHADEVAIAH GOPAL
author_sort	MAHADEVAIAH GOPAL
title	A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures
title_short	A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures
title_full	A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures
title_fullStr	A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures
title_full_unstemmed	A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures
title_sort	study of the mechanical properties of indium phosphide (inp) based mems structures
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13114
_version_	1681078802371837952

A Study of the Mechanical Properties of Indium Phosphide (InP) Based Mems Structures

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