Theoretical study of elementary surface reactions in silicon epitaxial growth
Ph.D
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2010
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/13228 |
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sg-nus-scholar.10635-132282015-01-15T00:30:13Z Theoretical study of elementary surface reactions in silicon epitaxial growth SHI JING CHEMISTRY KANG HWAY CHUAN Hydrogen, Silicon, Adsorption, Disilane, DFT, Epitaxy Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:31:10Z 2010-04-08T10:31:10Z 2008-04-21 Thesis SHI JING (2008-04-21). Theoretical study of elementary surface reactions in silicon epitaxial growth. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13228 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Hydrogen, Silicon, Adsorption, Disilane, DFT, Epitaxy |
| spellingShingle |
Hydrogen, Silicon, Adsorption, Disilane, DFT, Epitaxy SHI JING Theoretical study of elementary surface reactions in silicon epitaxial growth |
| description |
Ph.D |
| author2 |
CHEMISTRY |
| author_facet |
CHEMISTRY SHI JING |
| format |
Theses and Dissertations |
| author |
SHI JING |
| author_sort |
SHI JING |
| title |
Theoretical study of elementary surface reactions in silicon epitaxial growth |
| title_short |
Theoretical study of elementary surface reactions in silicon epitaxial growth |
| title_full |
Theoretical study of elementary surface reactions in silicon epitaxial growth |
| title_fullStr |
Theoretical study of elementary surface reactions in silicon epitaxial growth |
| title_full_unstemmed |
Theoretical study of elementary surface reactions in silicon epitaxial growth |
| title_sort |
theoretical study of elementary surface reactions in silicon epitaxial growth |
| publishDate |
2010 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/13228 |
| _version_ |
1681078821864865792 |