Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser
Master's
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| Format: | Theses and Dissertations |
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2010
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/13627 |
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sg-nus-scholar.10635-136272024-10-26T13:23:02Z Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser LAN BIN ELECTRICAL & COMPUTER ENGINEERING HONG MINGHUI Laser assisted MEMS fabrication by third harmonic DPSS Nd:YAG laser Master's MASTER OF ENGINEERING 2010-04-08T10:34:54Z 2010-04-08T10:34:54Z 2004-03-05 Thesis LAN BIN (2004-03-05). Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13627 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Laser assisted MEMS fabrication by third harmonic DPSS Nd:YAG laser |
| spellingShingle |
Laser assisted MEMS fabrication by third harmonic DPSS Nd:YAG laser LAN BIN Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser |
| description |
Master's |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING LAN BIN |
| format |
Theses and Dissertations |
| author |
LAN BIN |
| author_sort |
LAN BIN |
| title |
Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser |
| title_short |
Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser |
| title_full |
Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser |
| title_fullStr |
Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser |
| title_full_unstemmed |
Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser |
| title_sort |
laser-assisted mems fabrication by third harmonic dpss nd: yag laser |
| publishDate |
2010 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/13627 |
| _version_ |
1821223285023571968 |