METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION
Ph.D
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| Format: | Theses and Dissertations |
| Language: | English |
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2017
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/137641 |
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| Institution: | National University of Singapore |
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sg-nus-scholar.10635-1376412021-02-02T08:45:35Z METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION KONG LINGYU DEAN'S OFFICE (NGS FOR INTGR SCI & ENGG) CHIM WAI KIN CHIAM SING YANG metal-assisted chemical etching, MacEtch, redox reaction, isolated catalyst, porous nanostructure, silicon, In0.53Ga0.47As Ph.D DOCTOR OF PHILOSOPHY 2017-11-30T18:00:34Z 2017-11-30T18:00:34Z 2017-08-14 Thesis KONG LINGYU (2017-08-14). METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/137641 0000-0001-6057-8144 en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
metal-assisted chemical etching, MacEtch, redox reaction, isolated catalyst, porous nanostructure, silicon, In0.53Ga0.47As |
| spellingShingle |
metal-assisted chemical etching, MacEtch, redox reaction, isolated catalyst, porous nanostructure, silicon, In0.53Ga0.47As KONG LINGYU METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION |
| description |
Ph.D |
| author2 |
DEAN'S OFFICE (NGS FOR INTGR SCI & ENGG) |
| author_facet |
DEAN'S OFFICE (NGS FOR INTGR SCI & ENGG) KONG LINGYU |
| format |
Theses and Dissertations |
| author |
KONG LINGYU |
| author_sort |
KONG LINGYU |
| title |
METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION |
| title_short |
METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION |
| title_full |
METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION |
| title_fullStr |
METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION |
| title_full_unstemmed |
METAL ASSISTED CHEMICAL ETCHING OF SEMICONDUCTORS FOR ELECTRONICS APPLICATION |
| title_sort |
metal assisted chemical etching of semiconductors for electronics application |
| publishDate |
2017 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/137641 |
| _version_ |
1690655099343339520 |