Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment

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Main Author:	LI JINGHUI
Other Authors:	MATERIALS SCIENCE
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Porous Low-k, NH3 Plasma Treatment, Nano-indentation, Youngâ€™s Modulus, Hardness, Dense Surface Layer
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14950
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14950
record_format	dspace
spelling	sg-nus-scholar.10635-149502017-10-21T05:59:51Z Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment LI JINGHUI MATERIALS SCIENCE CHI DONGZHI Porous Low-k, NH3 Plasma Treatment, Nano-indentation, Youngâ€™s Modulus, Hardness, Dense Surface Layer Master's MASTER OF SCIENCE 2010-04-08T10:48:33Z 2010-04-08T10:48:33Z 2005-11-23 Thesis LI JINGHUI (2005-11-23). Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14950 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Porous Low-k, NH3 Plasma Treatment, Nano-indentation, Youngâ€™s Modulus, Hardness, Dense Surface Layer
spellingShingle	Porous Low-k, NH3 Plasma Treatment, Nano-indentation, Youngâ€™s Modulus, Hardness, Dense Surface Layer LI JINGHUI Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment
description	Master's
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE LI JINGHUI
format	Theses and Dissertations
author	LI JINGHUI
author_sort	LI JINGHUI
title	Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment
title_short	Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment
title_full	Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment
title_fullStr	Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment
title_full_unstemmed	Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment
title_sort	improvement of mechanical properties of mesoporous ultra low_k thin films after nh3 plasma treatment
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14950
_version_	1681079112834220032

Improvement of mechanical properties of mesoporous ultra low_k thin films after NH3 plasma treatment

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