Formation of advanced gate stacks and their application to nano structure devices
Ph.D
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| Format: | Theses and Dissertations |
| Language: | English |
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2010
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/15301 |
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| Institution: | National University of Singapore |
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sg-nus-scholar.10635-153012015-01-19T08:39:06Z Formation of advanced gate stacks and their application to nano structure devices CHEN JING HAO ELECTRICAL & COMPUTER ENGINEERING YOO WON JONG CHAN SIU HUNG, DANIEL Plasma, Etch, High-K, Memory, Nanocrystals, Nanodots Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:52:06Z 2010-04-08T10:52:06Z 2006-05-17 Thesis CHEN JING HAO (2006-05-17). Formation of advanced gate stacks and their application to nano structure devices. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15301 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Plasma, Etch, High-K, Memory, Nanocrystals, Nanodots |
| spellingShingle |
Plasma, Etch, High-K, Memory, Nanocrystals, Nanodots CHEN JING HAO Formation of advanced gate stacks and their application to nano structure devices |
| description |
Ph.D |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING CHEN JING HAO |
| format |
Theses and Dissertations |
| author |
CHEN JING HAO |
| author_sort |
CHEN JING HAO |
| title |
Formation of advanced gate stacks and their application to nano structure devices |
| title_short |
Formation of advanced gate stacks and their application to nano structure devices |
| title_full |
Formation of advanced gate stacks and their application to nano structure devices |
| title_fullStr |
Formation of advanced gate stacks and their application to nano structure devices |
| title_full_unstemmed |
Formation of advanced gate stacks and their application to nano structure devices |
| title_sort |
formation of advanced gate stacks and their application to nano structure devices |
| publishDate |
2010 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/15301 |
| _version_ |
1681079171802988544 |