Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques

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Main Author:	ANAY CHAUBE
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153884
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153884
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spelling	sg-nus-scholar.10635-1538842024-10-26T00:13:52Z Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques ANAY CHAUBE SINGAPORE-MIT ALLIANCE LIU BINGHAI MO ZHIQIANG ZHANG QING Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS Supervisors: 1. Dr. Liu Binghai, Dr Mo Zhiqiang, Chartered Semiconductor Manufacturing Ltd. 2. Prof. Zhang Qing, Nanyang Technological University 2019-05-09T04:10:21Z 2019-05-09T04:10:21Z 2008 Thesis ANAY CHAUBE (2008). Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153884 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE ANAY CHAUBE
format	Theses and Dissertations
author	ANAY CHAUBE
spellingShingle	ANAY CHAUBE Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques
author_sort	ANAY CHAUBE
title	Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques
title_short	Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques
title_full	Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques
title_fullStr	Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques
title_full_unstemmed	Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques
title_sort	development in chemical staining recipes (rie) for high-resolution scanning electron microscope (sem) analysis techniques
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153884
_version_	1821214515439599616

Development in Chemical Staining Recipes (RIE) for High-resolution Scanning Electron Microscope (SEM) Analysis Techniques

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