NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY

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Bibliographic Details
Main Author:	ZHONG WEIXIAN
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	tungsten potassium hydroxide tip apex diameter laser-enhanced chemical etching percentage reduction alternating current etching,28nm
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153959
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153959
record_format	dspace
spelling	sg-nus-scholar.10635-1539592024-10-26T00:14:01Z NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY ZHONG WEIXIAN SINGAPORE-MIT ALLIANCE ZHANG QING TOH SUEY LI tungsten potassium hydroxide tip apex diameter laser-enhanced chemical etching percentage reduction alternating current etching,28nm Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS Dissertation Supervisors 1. SMA: Assoc Prof Zhang Qing, SMA Fellow, Division of Microelectronics, School of Electrical & Electronic Engineering, NTU 2. GlobalFoundries: Dr Toh Suey Li, TD-NTP PSE, GlobalFoundries 2019-05-10T04:54:23Z 2019-05-10T04:54:23Z 2010 Thesis ZHONG WEIXIAN (2010). NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153959 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	tungsten potassium hydroxide tip apex diameter laser-enhanced chemical etching percentage reduction alternating current etching,28nm
spellingShingle	tungsten potassium hydroxide tip apex diameter laser-enhanced chemical etching percentage reduction alternating current etching,28nm ZHONG WEIXIAN NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE ZHONG WEIXIAN
format	Theses and Dissertations
author	ZHONG WEIXIAN
author_sort	ZHONG WEIXIAN
title	NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY
title_short	NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY
title_full	NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY
title_fullStr	NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY
title_full_unstemmed	NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY
title_sort	nanotips for device characterisation in sub-30nm technology
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153959
_version_	1821217135369650176

NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY

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