A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING

A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING

Master's

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Bibliographic Details
Main Author: HE LIWEI
Other Authors: SINGAPORE-MIT ALLIANCE
Format: Theses and Dissertations
Published: 2019
Subjects:
predictive maintenance
semiconductor manufacturing
maintenance strategy
data mining
multiple regression model
Online Access:https://scholarbank.nus.edu.sg/handle/10635/153971
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Institution: National University of Singapore
id sg-nus-scholar.10635-153971
record_format dspace
spelling sg-nus-scholar.10635-1539712024-10-26T00:14:08Z A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING HE LIWEI SINGAPORE-MIT ALLIANCE LEE HEOW PUEH DERMAWAN OTHMAN predictive maintenance semiconductor manufacturing maintenance strategy data mining multiple regression model Master's MASTER OF SCIENCE IN COMPUTATIONAL ENGINEERING Dissertation Supervisors: 1. Assoc. Prof. Lee Heow Pueh, SMA Fellow, NUS. 2. Mr. Dermawan Othman, TPM Manager, MS 2019-05-10T05:31:49Z 2019-05-10T05:31:49Z 2010 Thesis HE LIWEI (2010). A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153971 SMA BATCHLOAD 20190422
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic predictive maintenance
semiconductor manufacturing
maintenance strategy
data mining
multiple regression model
spellingShingle predictive maintenance
semiconductor manufacturing
maintenance strategy
data mining
multiple regression model
HE LIWEI
A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING
description Master's
author2 SINGAPORE-MIT ALLIANCE
author_facet SINGAPORE-MIT ALLIANCE
HE LIWEI
format Theses and Dissertations
author HE LIWEI
author_sort HE LIWEI
title A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING
title_short A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING
title_full A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING
title_fullStr A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING
title_full_unstemmed A PILOT STUDY OF PREDICTIVE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING
title_sort pilot study of predictive maintenance in semiconductor manufacturing
publishDate 2019
url https://scholarbank.nus.edu.sg/handle/10635/153971
_version_ 1821232206443446272

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