CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES

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Bibliographic Details
Main Author:	SEAH YUH MEEI
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	vibratory gyroscope accelerometer silicon surface micromachined device characterization mechanical sensing
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/154036
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-154036
record_format	dspace
spelling	sg-nus-scholar.10635-1540362019-05-10T13:16:35Z CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES SEAH YUH MEEI SINGAPORE-MIT ALLIANCE DU HEJUN WANG ZHE vibratory gyroscope accelerometer silicon surface micromachined device characterization mechanical sensing Master's MASTER OF SCIENCE 2019-05-10T07:27:54Z 2019-05-10T07:27:54Z 2003 Thesis SEAH YUH MEEI (2003). CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154036 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	vibratory gyroscope accelerometer silicon surface micromachined device characterization mechanical sensing
spellingShingle	vibratory gyroscope accelerometer silicon surface micromachined device characterization mechanical sensing SEAH YUH MEEI CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE SEAH YUH MEEI
format	Theses and Dissertations
author	SEAH YUH MEEI
author_sort	SEAH YUH MEEI
title	CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
title_short	CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
title_full	CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
title_fullStr	CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
title_full_unstemmed	CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
title_sort	characterization of silicon surface micromachined mems devices
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/154036
_version_	1681099329161396224

CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES

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