RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY

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Main Author:	TIONG CHEE HWA
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	low k1-lithography strong resolution enhancement technique simulation chromeless phase shift mask CLM PSM KrF lithography 248nm lithography comb structure damascene lithography
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/154131
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-154131
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spelling	sg-nus-scholar.10635-1541312019-05-15T13:14:46Z RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY TIONG CHEE HWA SINGAPORE-MIT ALLIANCE MOITREYEE MUKHERJEE-ROY NAVAB SINGH low k1-lithography strong resolution enhancement technique simulation chromeless phase shift mask CLM PSM KrF lithography 248nm lithography comb structure damascene lithography Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-15T04:18:30Z 2019-05-15T04:18:30Z 2003 Thesis TIONG CHEE HWA (2003). RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154131 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	low k1-lithography strong resolution enhancement technique simulation chromeless phase shift mask CLM PSM KrF lithography 248nm lithography comb structure damascene lithography
spellingShingle	low k1-lithography strong resolution enhancement technique simulation chromeless phase shift mask CLM PSM KrF lithography 248nm lithography comb structure damascene lithography TIONG CHEE HWA RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE TIONG CHEE HWA
format	Theses and Dissertations
author	TIONG CHEE HWA
author_sort	TIONG CHEE HWA
title	RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY
title_short	RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY
title_full	RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY
title_fullStr	RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY
title_full_unstemmed	RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY
title_sort	reticle modification for the resolution enhancement of the damascene lithography
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/154131
_version_	1681099342051540992

RETICLE MODIFICATION FOR THE RESOLUTION ENHANCEMENT OF THE DAMASCENE LITHOGRAPHY

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