PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT

• 主要作者: ZHU HONG
• 其他作者: SINGAPORE-MIT ALLIANCE
• 格式: Theses and Dissertations
• 出版: 2019
• 主題: High Q inductor; On-chip inductor; Cu single damascene process; Black DiamondTM; Deep trench formation; Metal hard mask
• 在線閱讀: https://scholarbank.nus.edu.sg/handle/10635/154134

Master's