PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT

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Bibliographic Details
Main Author:	ZHU HONG
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	High Q inductor On-chip inductor Cu single damascene process Black DiamondTM Deep trench formation Metal hard mask
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/154134
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-154134
record_format	dspace
spelling	sg-nus-scholar.10635-1541342019-05-15T13:14:51Z PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT ZHU HONG SINGAPORE-MIT ALLIANCE JEFFREY SU YONG JIE LU LI High Q inductor On-chip inductor Cu single damascene process Black DiamondTM Deep trench formation Metal hard mask Master's MASTER OF SCIENCE 2019-05-15T04:18:33Z 2019-05-15T04:18:33Z 2003 Thesis ZHU HONG (2003). PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154134 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	High Q inductor On-chip inductor Cu single damascene process Black DiamondTM Deep trench formation Metal hard mask
spellingShingle	High Q inductor On-chip inductor Cu single damascene process Black DiamondTM Deep trench formation Metal hard mask ZHU HONG PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE ZHU HONG
format	Theses and Dissertations
author	ZHU HONG
author_sort	ZHU HONG
title	PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT
title_short	PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT
title_full	PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT
title_fullStr	PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT
title_full_unstemmed	PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT
title_sort	process study of high q inductor fabrication with cu / low - k interconnect
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/154134
_version_	1681099342595751936

PROCESS STUDY OF HIGH Q INDUCTOR FABRICATION WITH CU / LOW - K INTERCONNECT

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