Nonlinear vibration of micromechanical resonators

Ph.D

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Bibliographic Details
Main Author:	SHAO LICHUN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	nonlinear vibration, micromechanical resonator, MEMS, etch hole, gap reduction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15848
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15848
record_format	dspace
spelling	sg-nus-scholar.10635-158482015-02-01T18:04:58Z Nonlinear vibration of micromechanical resonators SHAO LICHUN ELECTRICAL & COMPUTER ENGINEERING TAN WOEI WAN MOORTHI S/O PALANIAPAN nonlinear vibration, micromechanical resonator, MEMS, etch hole, gap reduction Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:58:03Z 2010-04-08T10:58:03Z 2009-05-16 Thesis SHAO LICHUN (2009-05-16). Nonlinear vibration of micromechanical resonators. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15848 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	nonlinear vibration, micromechanical resonator, MEMS, etch hole, gap reduction
spellingShingle	nonlinear vibration, micromechanical resonator, MEMS, etch hole, gap reduction SHAO LICHUN Nonlinear vibration of micromechanical resonators
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING SHAO LICHUN
format	Theses and Dissertations
author	SHAO LICHUN
author_sort	SHAO LICHUN
title	Nonlinear vibration of micromechanical resonators
title_short	Nonlinear vibration of micromechanical resonators
title_full	Nonlinear vibration of micromechanical resonators
title_fullStr	Nonlinear vibration of micromechanical resonators
title_full_unstemmed	Nonlinear vibration of micromechanical resonators
title_sort	nonlinear vibration of micromechanical resonators
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15848
_version_	1681079263595331584

Nonlinear vibration of micromechanical resonators

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