SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS

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Bibliographic Details
Main Author:	LIM SHUANG FANG
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Published:	2019
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/158685
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-158685
record_format	dspace
spelling	sg-nus-scholar.10635-1586852024-10-25T20:32:40Z SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS LIM SHUANG FANG PHYSICS ANDREW WEE THYE SHEN LIN JIANYI Master's MASTER OF SCIENCE 2019-09-16T02:34:48Z 2019-09-16T02:34:48Z 2000 Thesis LIM SHUANG FANG (2000). SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/158685 CCK BATCHLOAD 20190911
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Master's
author2	PHYSICS
author_facet	PHYSICS LIM SHUANG FANG
format	Theses and Dissertations
author	LIM SHUANG FANG
spellingShingle	LIM SHUANG FANG SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS
author_sort	LIM SHUANG FANG
title	SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS
title_short	SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS
title_full	SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS
title_fullStr	SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS
title_full_unstemmed	SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS
title_sort	synthesis and characterization of rf-pecvd carbon nitride thin films
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/158685
_version_	1821200086723461120

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