SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/158743 |
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sg-nus-scholar.10635-1587432024-04-17T06:15:09Z SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING LOW CHUN HUI CHEMISTRY CHIN WEE SHONG Master's MASTER OF SCIENCE 2019-09-16T02:36:59Z 2019-09-16T02:36:59Z 1999 Thesis LOW CHUN HUI (1999). SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/158743 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
CHEMISTRY |
| author_facet |
CHEMISTRY LOW CHUN HUI |
| format |
Theses and Dissertations |
| author |
LOW CHUN HUI |
| spellingShingle |
LOW CHUN HUI SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| author_sort |
LOW CHUN HUI |
| title |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_short |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_full |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_fullStr |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_full_unstemmed |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_sort |
spectroscopic studies of high density plasma etching processes for ic manufacturing |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/158743 |
| _version_ |
1800913732818173952 |