Control and signal processing for lithography

Ph.D

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Bibliographic Details
Main Author:	CHEN MING
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Lithography, Critical Dimension, wafer warpage, real-time control, resist thickness, optimal feed-forward control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15988
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15988
record_format	dspace
spelling	sg-nus-scholar.10635-159882015-01-06T09:32:59Z Control and signal processing for lithography CHEN MING ELECTRICAL & COMPUTER ENGINEERING HO WENG KHUEN TAY EE BENG, ARTHUR Lithography, Critical Dimension, wafer warpage, real-time control, resist thickness, optimal feed-forward control Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:59:39Z 2010-04-08T10:59:39Z 2008-09-26 Thesis CHEN MING (2008-09-26). Control and signal processing for lithography. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15988 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Lithography, Critical Dimension, wafer warpage, real-time control, resist thickness, optimal feed-forward control
spellingShingle	Lithography, Critical Dimension, wafer warpage, real-time control, resist thickness, optimal feed-forward control CHEN MING Control and signal processing for lithography
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING CHEN MING
format	Theses and Dissertations
author	CHEN MING
author_sort	CHEN MING
title	Control and signal processing for lithography
title_short	Control and signal processing for lithography
title_full	Control and signal processing for lithography
title_fullStr	Control and signal processing for lithography
title_full_unstemmed	Control and signal processing for lithography
title_sort	control and signal processing for lithography
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15988
_version_	1681079287137959936

Control and signal processing for lithography

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