SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/159999 |
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sg-nus-scholar.10635-1599992019-10-18T05:44:07Z SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS LIM SHUANG FANG DEPT OF PHYSICS ANDREW WEE THYE SHEN LIN JIANYI Master's MASTER OF SCIENCE 2019-10-18T05:44:07Z 2019-10-18T05:44:07Z 2000 Thesis LIM SHUANG FANG (2000). SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/159999 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
DEPT OF PHYSICS |
| author_facet |
DEPT OF PHYSICS LIM SHUANG FANG |
| format |
Theses and Dissertations |
| author |
LIM SHUANG FANG |
| spellingShingle |
LIM SHUANG FANG SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS |
| author_sort |
LIM SHUANG FANG |
| title |
SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS |
| title_short |
SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS |
| title_full |
SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS |
| title_fullStr |
SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS |
| title_full_unstemmed |
SYNTHESIS AND CHARACTERIZATION OF RF-PECVD CARBON NITRIDE THIN FILMS |
| title_sort |
synthesis and characterization of rf-pecvd carbon nitride thin films |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/159999 |
| _version_ |
1681099994700972032 |