SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/160057 |
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sg-nus-scholar.10635-1600572019-10-18T05:45:44Z SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING LOW CHUN HUI DEPT OF CHEMISTRY CHIN WEE SHONG Master's MASTER OF SCIENCE 2019-10-18T05:45:44Z 2019-10-18T05:45:44Z 1999 Thesis LOW CHUN HUI (1999). SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/160057 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
DEPT OF CHEMISTRY |
| author_facet |
DEPT OF CHEMISTRY LOW CHUN HUI |
| format |
Theses and Dissertations |
| author |
LOW CHUN HUI |
| spellingShingle |
LOW CHUN HUI SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| author_sort |
LOW CHUN HUI |
| title |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_short |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_full |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_fullStr |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_full_unstemmed |
SPECTROSCOPIC STUDIES OF HIGH DENSITY PLASMA ETCHING PROCESSES FOR IC MANUFACTURING |
| title_sort |
spectroscopic studies of high density plasma etching processes for ic manufacturing |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/160057 |
| _version_ |
1681100005178343424 |