$Image formation using geometrical theory of diffraction and its applications to lithography$

Image formation using geometrical theory of diffraction and its applications to lithography

Ph.D

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Bibliographic Details
Main Author:	KHOH KER CHING, ANDREW
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2019
Subjects:	image formation theory, geometrical theory of diffraction, lithography, optical proximity correction, simulation
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/161037
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-161037
record_format	dspace
spelling	sg-nus-scholar.10635-1610372024-10-26T01:27:00Z Image formation using geometrical theory of diffraction and its applications to lithography KHOH KER CHING, ANDREW ELECTRICAL & COMPUTER ENGINEERING WU YIHONG SAMUDRA, GANESH S image formation theory, geometrical theory of diffraction, lithography, optical proximity correction, simulation Ph.D DOCTOR OF PHILOSOPHY 2019-10-31T18:04:08Z 2019-10-31T18:04:08Z 2005-06-02 Thesis KHOH KER CHING, ANDREW (2005-06-02). Image formation using geometrical theory of diffraction and its applications to lithography. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/161037 en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	image formation theory, geometrical theory of diffraction, lithography, optical proximity correction, simulation
spellingShingle	image formation theory, geometrical theory of diffraction, lithography, optical proximity correction, simulation KHOH KER CHING, ANDREW Image formation using geometrical theory of diffraction and its applications to lithography
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING KHOH KER CHING, ANDREW
format	Theses and Dissertations
author	KHOH KER CHING, ANDREW
author_sort	KHOH KER CHING, ANDREW
title	Image formation using geometrical theory of diffraction and its applications to lithography
title_short	Image formation using geometrical theory of diffraction and its applications to lithography
title_full	Image formation using geometrical theory of diffraction and its applications to lithography
title_fullStr	Image formation using geometrical theory of diffraction and its applications to lithography
title_full_unstemmed	Image formation using geometrical theory of diffraction and its applications to lithography
title_sort	image formation using geometrical theory of diffraction and its applications to lithography
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/161037
_version_	1821181592277614592

Image formation using geometrical theory of diffraction and its applications to lithography

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