Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing

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Bibliographic Details
Main Author:	ANDREAS
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Photolithography, Critical Dimension, Thermal Processing, MMPC, MPC, Multiplexed MPC
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/16470
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-16470
record_format	dspace
spelling	sg-nus-scholar.10635-164702015-01-31T08:28:57Z Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing ANDREAS ELECTRICAL & COMPUTER ENGINEERING HO WENG KHUEN Photolithography, Critical Dimension, Thermal Processing, MMPC, MPC, Multiplexed MPC Master's MASTER OF ENGINEERING 2010-04-08T11:05:17Z 2010-04-08T11:05:17Z 2009-01-29 Thesis ANDREAS (2009-01-29). Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/16470 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Photolithography, Critical Dimension, Thermal Processing, MMPC, MPC, Multiplexed MPC
spellingShingle	Photolithography, Critical Dimension, Thermal Processing, MMPC, MPC, Multiplexed MPC ANDREAS Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING ANDREAS
format	Theses and Dissertations
author	ANDREAS
author_sort	ANDREAS
title	Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing
title_short	Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing
title_full	Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing
title_fullStr	Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing
title_full_unstemmed	Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing
title_sort	multiplexed mpc for mutli-zone thermal processing in semiconductor manufacturing
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/16470
_version_	1681079368510603264

Multiplexed MPC for mutli-zone thermal processing in semiconductor manufacturing

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