Materials & Process Integration for MEMS

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Bibliographic Details
Main Author:	Tay, Francis EH
Other Authors:	MECHANICAL ENGINEERING
Format:	Book
Published:	Springer Science & Business Media 2020
Subjects:	Technology & Engineering
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/169466
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-169466
record_format	dspace
spelling	sg-nus-scholar.10635-1694662024-04-04T02:04:37Z Materials & Process Integration for MEMS Tay, Francis EH MECHANICAL ENGINEERING Technology & Engineering 2020-06-05T09:23:34Z 2020-06-05T09:23:34Z 2013-06-29 2020-06-03T04:59:51Z Book Tay, Francis EH (2013-06-29). Materials & Process Integration for MEMS. ScholarBank@NUS Repository. 1475757913,9781475757910 https://scholarbank.nus.edu.sg/handle/10635/169466 Springer Science & Business Media Elements
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Technology & Engineering
spellingShingle	Technology & Engineering Tay, Francis EH Materials & Process Integration for MEMS
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, Francis EH
format	Book
author	Tay, Francis EH
author_sort	Tay, Francis EH
title	Materials & Process Integration for MEMS
title_short	Materials & Process Integration for MEMS
title_full	Materials & Process Integration for MEMS
title_fullStr	Materials & Process Integration for MEMS
title_full_unstemmed	Materials & Process Integration for MEMS
title_sort	materials & process integration for mems
publisher	Springer Science & Business Media
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/169466
_version_	1800914040785993728

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