Selective Wet Etching of Silicon Germanium in Composite Vertical Nanowires

• Main Authors: ZHASLAN BARAISSOV, Antoine Pacco, SIDDARDHA KONETI, GEETA BISHT, Federico Panciera, Frank Holsteyns, UTKUR MIRZIYODOVICH MIRSAIDOV
• Other Authors: CENTRE FOR ADVANCED 2D MATERIALS
• Format: Article
• Language: English
• Published: ACS Applied Materials And Interfaces 2020
• Subjects: Etching,Interfaces,Nanowires,Transmission electron microscopy,Manufacturing
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/177661
• Institution: National University of Singapore

10.1021/acsami.9b11934