EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS
Master's
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2020
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/177891 |
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sg-nus-scholar.10635-1778912020-11-19T13:57:16Z EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS CHOO CHONG KHENG ELECTRICAL ENGINEERING CHOI WEE KIONG LU YONG FENG Master's MASTER OF ENGINEERING 2020-10-20T03:53:34Z 2020-10-20T03:53:34Z 1997 Thesis CHOO CHONG KHENG (1997). EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/177891 CCK BATCHLOAD 20201023 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING CHOO CHONG KHENG |
| format |
Theses and Dissertations |
| author |
CHOO CHONG KHENG |
| spellingShingle |
CHOO CHONG KHENG EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS |
| author_sort |
CHOO CHONG KHENG |
| title |
EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS |
| title_short |
EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS |
| title_full |
EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS |
| title_fullStr |
EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS |
| title_full_unstemmed |
EFFECT OF RAPID THERMAL ANNEALING ON RF SPUTTERED SILICON-SILICON OXIDE SYSTEMS |
| title_sort |
effect of rapid thermal annealing on rf sputtered silicon-silicon oxide systems |
| publishDate |
2020 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/177891 |
| _version_ |
1686108961875427328 |