ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS

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Main Author:	HAN KING KWANG
Other Authors:	ELECTRICAL ENGINEERING
Format:	Theses and Dissertations
Published:	2020
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/180213
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-180213
record_format	dspace
spelling	sg-nus-scholar.10635-1802132020-11-19T13:57:19Z ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS HAN KING KWANG ELECTRICAL ENGINEERING CHOI WEE KIONG CHIM WAI KIM Master's MASTER OF ENGINEERING 2020-10-26T07:31:04Z 2020-10-26T07:31:04Z 1998 Thesis HAN KING KWANG (1998). ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/180213 CCK BATCHLOAD 20201023
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Master's
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING HAN KING KWANG
format	Theses and Dissertations
author	HAN KING KWANG
spellingShingle	HAN KING KWANG ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS
author_sort	HAN KING KWANG
title	ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS
title_short	ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS
title_full	ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS
title_fullStr	ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS
title_full_unstemmed	ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS
title_sort	electrical and structural characterisation of rapid thermal annealed rf sputtered silicon oxide films
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/180213
_version_	1686109093215862784

ELECTRICAL AND STRUCTURAL CHARACTERISATION OF RAPID THERMAL ANNEALED RF SPUTTERED SILICON OXIDE FILMS

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