Fabrication and characteristics of high-k MIM capacitors for high precision applications

Ph.D

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Bibliographic Details
Main Author:	YANG JIANJUN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	MIM, high-K, capacitor,plasma treatment, cancelling effect, precision applications
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/18417
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-18417
record_format	dspace
spelling	sg-nus-scholar.10635-184172024-10-26T02:32:19Z Fabrication and characteristics of high-k MIM capacitors for high precision applications YANG JIANJUN ELECTRICAL & COMPUTER ENGINEERING ZHU CHUNXIANG LI MING-FU DIM LEE KWONG MIM, high-K, capacitor,plasma treatment, cancelling effect, precision applications Ph.D DOCTOR OF PHILOSOPHY 2010-10-31T18:00:43Z 2010-10-31T18:00:43Z 2009-08-13 Thesis YANG JIANJUN (2009-08-13). Fabrication and characteristics of high-k MIM capacitors for high precision applications. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/18417 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	MIM, high-K, capacitor,plasma treatment, cancelling effect, precision applications
spellingShingle	MIM, high-K, capacitor,plasma treatment, cancelling effect, precision applications YANG JIANJUN Fabrication and characteristics of high-k MIM capacitors for high precision applications
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING YANG JIANJUN
format	Theses and Dissertations
author	YANG JIANJUN
author_sort	YANG JIANJUN
title	Fabrication and characteristics of high-k MIM capacitors for high precision applications
title_short	Fabrication and characteristics of high-k MIM capacitors for high precision applications
title_full	Fabrication and characteristics of high-k MIM capacitors for high precision applications
title_fullStr	Fabrication and characteristics of high-k MIM capacitors for high precision applications
title_full_unstemmed	Fabrication and characteristics of high-k MIM capacitors for high precision applications
title_sort	fabrication and characteristics of high-k mim capacitors for high precision applications
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/18417
_version_	1821191245932789760

Fabrication and characteristics of high-k MIM capacitors for high precision applications

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