Nanometer-Scale Heterogeneous Interfacial Sapphire Wafer Bonding for Enabling Plasmonic-Enhanced Nanofluidic Mid-Infrared Spectroscopy

Nanometer-Scale Heterogeneous Interfacial Sapphire Wafer Bonding for Enabling Plasmonic-Enhanced Nanofluidic Mid-Infrared Spectroscopy

10.1021/acsnano.0c05794

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Bibliographic Details
Main Authors:	Xu, Jikai, Ren, Zhihao, Dong, Bowei, Liu, Xinmiao, Wang, Chenxi, Tian, Yanhong, Lee, Chengkuo
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Language:	English
Published:	AMER CHEMICAL SOC 2021
Subjects:	Science & Technology Physical Sciences Technology Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Chemistry Science & Technology - Other Topics Materials Science surface-enhanced infrared absorption mid-infrared dynamic monitoring plasmonics nanofluidic wafer direct bonding
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/188705
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Institution:	National University of Singapore
Language:	English

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