Micromachining of Silicon via ION Irradiation with Porous Silicon Formation

Ph.D

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Bibliographic Details
Main Author:	OW YUEH SHENG
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	micromachining, silicon, porous silicon, ion irradiation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/20958
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-20958
record_format	dspace
spelling	sg-nus-scholar.10635-209582024-10-25T23:05:07Z Micromachining of Silicon via ION Irradiation with Porous Silicon Formation OW YUEH SHENG PHYSICS MARK B H BREESE BETTIOL, ANDREW ANTHONY micromachining, silicon, porous silicon, ion irradiation Ph.D DOCTOR OF PHILOSOPHY 2011-03-31T18:00:55Z 2011-03-31T18:00:55Z 2010-08-05 Thesis OW YUEH SHENG (2010-08-05). Micromachining of Silicon via ION Irradiation with Porous Silicon Formation. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/20958 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	micromachining, silicon, porous silicon, ion irradiation
spellingShingle	micromachining, silicon, porous silicon, ion irradiation OW YUEH SHENG Micromachining of Silicon via ION Irradiation with Porous Silicon Formation
description	Ph.D
author2	PHYSICS
author_facet	PHYSICS OW YUEH SHENG
format	Theses and Dissertations
author	OW YUEH SHENG
author_sort	OW YUEH SHENG
title	Micromachining of Silicon via ION Irradiation with Porous Silicon Formation
title_short	Micromachining of Silicon via ION Irradiation with Porous Silicon Formation
title_full	Micromachining of Silicon via ION Irradiation with Porous Silicon Formation
title_fullStr	Micromachining of Silicon via ION Irradiation with Porous Silicon Formation
title_full_unstemmed	Micromachining of Silicon via ION Irradiation with Porous Silicon Formation
title_sort	micromachining of silicon via ion irradiation with porous silicon formation
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/20958
_version_	1821215215164850176

Micromachining of Silicon via ION Irradiation with Porous Silicon Formation

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