The nature of column boundaries in micro-structured silicon oxide nanolayers

10.1063/5.0073349

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Bibliographic Details
Main Authors:	Patel, K., Cottom, J., Mehonic, A., Ng, W. H., Kenyon, A. J., Bosman, M., Shluger, A. L.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	American Institute of Physics Inc. 2022
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/232276
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-232276
record_format	dspace
spelling	sg-nus-scholar.10635-2322762023-11-01T08:32:15Z The nature of column boundaries in micro-structured silicon oxide nanolayers Patel, K. Cottom, J. Mehonic, A. Ng, W. H. Kenyon, A. J. Bosman, M. Shluger, A. L. MATERIALS SCIENCE AND ENGINEERING 10.1063/5.0073349 APL Materials 9 12 121107 2022-10-12T07:53:27Z 2022-10-12T07:53:27Z 2021-12-01 Article Patel, K., Cottom, J., Mehonic, A., Ng, W. H., Kenyon, A. J., Bosman, M., Shluger, A. L. (2021-12-01). The nature of column boundaries in micro-structured silicon oxide nanolayers. APL Materials 9 (12) : 121107. ScholarBank@NUS Repository. https://doi.org/10.1063/5.0073349 2166-532X https://scholarbank.nus.edu.sg/handle/10635/232276 Attribution 4.0 International https://creativecommons.org/licenses/by/4.0/ American Institute of Physics Inc. Scopus OA2021
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/5.0073349
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Patel, K. Cottom, J. Mehonic, A. Ng, W. H. Kenyon, A. J. Bosman, M. Shluger, A. L.
format	Article
author	Patel, K. Cottom, J. Mehonic, A. Ng, W. H. Kenyon, A. J. Bosman, M. Shluger, A. L.
spellingShingle	Patel, K. Cottom, J. Mehonic, A. Ng, W. H. Kenyon, A. J. Bosman, M. Shluger, A. L. The nature of column boundaries in micro-structured silicon oxide nanolayers
author_sort	Patel, K.
title	The nature of column boundaries in micro-structured silicon oxide nanolayers
title_short	The nature of column boundaries in micro-structured silicon oxide nanolayers
title_full	The nature of column boundaries in micro-structured silicon oxide nanolayers
title_fullStr	The nature of column boundaries in micro-structured silicon oxide nanolayers
title_full_unstemmed	The nature of column boundaries in micro-structured silicon oxide nanolayers
title_sort	nature of column boundaries in micro-structured silicon oxide nanolayers
publisher	American Institute of Physics Inc.
publishDate	2022
url	https://scholarbank.nus.edu.sg/handle/10635/232276
_version_	1781793315253911552

The nature of column boundaries in micro-structured silicon oxide nanolayers

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