ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY

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Main Author: CHEAH CHEE LIANG
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2023
Subjects:
Online Access:https://scholarbank.nus.edu.sg/handle/10635/242997
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Institution: National University of Singapore
Language: English
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spelling sg-nus-scholar.10635-2429972024-04-17T02:40:45Z ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY CHEAH CHEE LIANG MATERIALS SCIENCE AND ENGINEERING Jingsheng Chen 3D NAND; Micron; High Stress; Thermal Stability Master's MASTER OF ENGINEERING (CDE) 2023-07-10T18:00:19Z 2023-07-10T18:00:19Z 2022-12-22 Thesis CHEAH CHEE LIANG (2022-12-22). ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/242997 0009-0005-6527-3899 en
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
language English
topic 3D NAND; Micron; High Stress; Thermal Stability
spellingShingle 3D NAND; Micron; High Stress; Thermal Stability
CHEAH CHEE LIANG
ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY
description Master's
author2 MATERIALS SCIENCE AND ENGINEERING
author_facet MATERIALS SCIENCE AND ENGINEERING
CHEAH CHEE LIANG
format Theses and Dissertations
author CHEAH CHEE LIANG
author_sort CHEAH CHEE LIANG
title ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY
title_short ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY
title_full ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY
title_fullStr ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY
title_full_unstemmed ADVANCED MATERIALS DEVELOPMENT AND MANUFACTURING - DEVELOPMENT OF THERMALLY STABLE THIN FILMS WITH HIGH STRESS TUNABILITY
title_sort advanced materials development and manufacturing - development of thermally stable thin films with high stress tunability
publishDate 2023
url https://scholarbank.nus.edu.sg/handle/10635/242997
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