Tribology of Su-8 Micro-Dot Patterns on Silicon Surface

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Bibliographic Details
Main Author:	TAY NAM BENG
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	Micro-patterning, Tribology, SU-8, Polymer Jet Printing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/29559
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Institution:	National University of Singapore
Language:	English

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spelling	sg-nus-scholar.10635-295592017-10-21T09:20:56Z Tribology of Su-8 Micro-Dot Patterns on Silicon Surface TAY NAM BENG MECHANICAL ENGINEERING SINHA, SUJEET KUMAR Micro-patterning, Tribology, SU-8, Polymer Jet Printing Master's MASTER OF ENGINEERING 2011-11-30T18:00:44Z 2011-11-30T18:00:44Z 2011-08-18 Thesis TAY NAM BENG (2011-08-18). Tribology of Su-8 Micro-Dot Patterns on Silicon Surface. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/29559 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Micro-patterning, Tribology, SU-8, Polymer Jet Printing
spellingShingle	Micro-patterning, Tribology, SU-8, Polymer Jet Printing TAY NAM BENG Tribology of Su-8 Micro-Dot Patterns on Silicon Surface
description	Master's
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING TAY NAM BENG
format	Theses and Dissertations
author	TAY NAM BENG
author_sort	TAY NAM BENG
title	Tribology of Su-8 Micro-Dot Patterns on Silicon Surface
title_short	Tribology of Su-8 Micro-Dot Patterns on Silicon Surface
title_full	Tribology of Su-8 Micro-Dot Patterns on Silicon Surface
title_fullStr	Tribology of Su-8 Micro-Dot Patterns on Silicon Surface
title_full_unstemmed	Tribology of Su-8 Micro-Dot Patterns on Silicon Surface
title_sort	tribology of su-8 micro-dot patterns on silicon surface
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/29559
_version_	1681080870820118528

Tribology of Su-8 Micro-Dot Patterns on Silicon Surface

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